Design and lithographic realization of optical micro- and nanostructures for spectroscopy, laser puls compression, beam shaping, miniaturized illumination and imaging optics. Replication by UV molding technique as well as reactive ion (beam) etching of diverse materials amongst them Si, SiO2, borofloat glass, Ge, C, LiNbO3. Metrology services FIB/SEM, AFM, LSM, WLI, large area interferometry, UV-VIS-IR spectroscopy, ellipsometry, angle-resolved scatterometry, optical function testing.