SUSS MicroOptics is a premium supplier of high-end diffractive optical elements. They are suitable for very demanding applications such as DOE-based spot generators, DUV wafer stepper illumination systems, high-power laser beam shaping, vortex lenses for fiber interconnects, random DOE and diffusers for beam smoothing, metrology, medical devices and masters for imprint or replication.

• Materials -- Fused silica (various grades) and silicon
• Composition - 2 (binary) to 16 levels
• Precision - Typically overlay error <70 nm
• Minimum feature size  - 500 nm to 1 μm depending on step height and / or etch depths
• Efficiency Up to 96%