Origination
TECHNICAL SERVICE
CSEM SA
Wafer-scale
[OPTICAL ELEMENTS] thermal reflow [OPTICAL ELEMENTS] photolitho
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Origination of micro-lens arrays by photolitho & thermal reflow

  • Gap min: 1 micron
  • Array: Hexagonal/Square/None
  • Substrate size min: 2x2 mm2
  • Substrate size max: 6-in wafer
  • Shape: Circular/Cylindric/Square footprint