Replication at Wafer-scale
[REPLICATION] UV-NIL replication
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Replication of

  • microlens
  • microlens arrays
  • free-form micro-optical elements

at wafer scale

  • Replication on max 6 in-wafers
  • Aligment precision below 2 microns
  • Minimum residual layer thickness from 50 micron down (depending on the replication area and material)
  • Max quantities: 50-100 wafers / year
  • Lens material: polymer / hybrid polymers / sol-gel materials
  • Substrate material: glass, silicon, II-V semicon, polymers etc.