Vacuum Roll-to-roll Coating
We provide vacuum web coating plants for coating of flexible materials with optical, electrical and decorative functional layers and barrier layers via sputtering techniques and magnetron PECVD processes. Line speed of up to 100 meters per minute can be achieved.
TECHNICAL SERVICE
Fraunhofer FEP
R2R
[LAYER DEPOSITION] Magnetron Sputtering [LAYER DEPOSITION] Other [INSPECTION] Electrical testing [INSPECTION] Optical inspection
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The surface refinement of polymer films and other flexible substrates by applying thin coatings allows these materials to be used in a wide range of products. Vacuum based roll-to-roll plants allow coatings to be efficiently applied at favorable cost.

The coFlex® 600 vacuum web coating plant can be used to deposit optical, electrical, and decorative layers on substrates via sputtering techniques and magnetron PECVD processes. Line speed of up to 100 meters per minute can be achieved. Potential applications for the coated materials are numerous. Optical layer systems are, for example, used for UV mirrors and as infrared-reflecting heat

protection layers. Electromagnetic decoupling layers (EMI layers) and transparent conducting layers are used for displays. Flexible solar cells require front and back contacts or transparent conducting layers which are applied to polymer films.

The coFlex® 600 has a pre-treatment unit, optical in-situ measuring units, and several coating chambers. Thus, at Fraunhofer FEP we have a complete system for the development and pilot production

of multilayer systems under realistic production conditions at our disposal.

Offering:

  • development of technologies for coating on polymer films and other flexible materials and development of plasma pretreatment processes
  • development of layer systems (optical, electrical, and decorative functional layers, barrier layers)
  • development and testing of key components
  • sample provision for testing and marketing purposes and pilot production
  • studies on the efficiency of coating processes

  • Deposition width: up to 600 mm
  • Web width: up to 650 mm
  • Web thickness: 7…200 µm
  • Max. external diameter: 400 mm
  • Web speed: 0.1…100 m/min
  • Coating materials: metals, TiO2 , SiO2 , Nb2 O5 , ITO, ZAO, SnO2 , HfO2 , WO3 , TiN, Si3 N4 , ZrO2 , …
  • in-situ monitoring: optical transmission and reflection; electrical resistance
  • Process modules: single/dual magnetron sputter systems; rotatable magnetrons; ion source
Schematic of roll-to-roll sputtering tool
Schematic of roll-to-roll sputtering tool
Polymer substrate for roll-to-roll vacuum coating
Polymer substrate for roll-to-roll vacuum coating
View into magnetron plasma discharge
View into magnetron plasma discharge